Advanced Epi Tools for Gallium Nitride LED (Light Emitting Diode) DevicesCX(s) Applied: B3.6Date: 03/05/2010Location(s): Santa Clara, CaliforniaOffice(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
Office of NEPA Policy and Compliance
March 5, 2010
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Advanced Epi Tools for Gallium Nitride LED (Light Emitting Diode) Devices
CX(s) Applied: B3.6
Date: 03/05/2010
Location(s): Santa Clara, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
CX(s) Applied: B3.6
Date: 03/05/2010
Location(s): Santa Clara, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
To develop a multi-chamber system such as two metal oxide chemical vapor deposition chambers, one hydride vapor phase epitaxy chamber, lamp heating, and automated in situ cleaning.