Implementation of Process Simulation Tools and Temperature Control Methods for Metal Oxide Chemical Vapor Deposition GrowthCX(s) Applied: A9Date: 03/11/2010Location(s): Plainview, New YorkOffice(s): Energy Efficiency and Renewable Energy, National Ener...
Office of NEPA Policy and Compliance
March 11, 2010
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Implementation of Process Simulation Tools and Temperature Control Methods for Metal Oxide Chemical Vapor Deposition Growth
CX(s) Applied: A9
Date: 03/11/2010
Location(s): Plainview, New York
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
CX(s) Applied: A9
Date: 03/11/2010
Location(s): Plainview, New York
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
Multi-faceted two-year program to develop high-volume epitaxial growth systems that provide a greater than 4-times reduction in high brightness LED (light-emitting diode) per-device cost for epitaxial growth. Work at this site is computer design only.