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CX-001137: Categorical Exclusion Determination

Advanced Epi Tools for Gallium Nitride LED (Light Emitting Diode) Devices
CX(s) Applied: B3.6
Date: 03/05/2010
Location(s): Santa Clara, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory

To develop a multi-chamber system such as two metal oxide chemical vapor deposition chambers, one hydride vapor phase epitaxy chamber, lamp heating, and automated in situ cleaning.

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