Advanced Epi Tools for Gallium Nitride LED (Light Emitting Diode) Devices
CX(s) Applied: B3.6
Location(s): Santa Clara, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
To develop a multi-chamber system such as two metal oxide chemical vapor deposition chambers, one hydride vapor phase epitaxy chamber, lamp heating, and automated in situ cleaning.