Low Cost Lithography for High Brightness LED (Light-emitting diode) ManufacturingCX(s) Applied: B3.6Date: 02/12/2010Location(s): San Jose, CaliforniaOffice(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
Office of NEPA Policy and Compliance
February 12, 2010
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Low Cost Lithography for High Brightness LED (Light-emitting diode) Manufacturing
CX(s) Applied: B3.6
Date: 02/12/2010
Location(s): San Jose, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
CX(s) Applied: B3.6
Date: 02/12/2010
Location(s): San Jose, California
Office(s): Energy Efficiency and Renewable Energy, National Energy Technology Laboratory
Light Emitting Diode Manufacturing projection lithographic tool for improved accuracy and larger diameter substrate handling.